Combining with simulation by CoventorWare, the methods of using different thickness of grating margin, foursquare electrode, laddering electrode and thinner cantilever can increase the optical active area from 50% to 60%, 70%, 75%, 85% respectively.

• 利用CoventorWare仿真,采用不等厚光栅边距、正方形电极、阶梯型电极、减薄悬臂梁,分别将有效光学面积由50%25约提高至60%25, 70%25, 75%25, 85%25。