Coherent light sources in the deep and vacuum UV (DUV and VUV) spectral regions become more important with the development of photolithography, laser micro-machining as well as laser spectroscopy.

• 随着光刻、激光微加工以及激光光谱仪的发展,紫外与深紫外光谱区的相干光源变得越来越重要。