Chemical-mechanical polishing (CMP) process is the key important planarization process in ULSI manufacturing.The RBR control applied on the CMP process is introduced in this paper.

• 摘要本论文介绍了RBR过程控制技术在超大规模集成电路(ULSI)制造中的化学机械抛光(CMP)这一关键工艺中的应用。