But with the development of Micro-Electro-Mechanical System (MEMS) technology, porous silicon has become a new kind of sacrificial and thermal insulating material used in MEMS due to its excellent mechanical and thermal isolation properties.

• 近几年来,随着微电子机械系统(MEMS)的发展,多孔硅优良的机械性能和热学性能逐渐为人们所关注,成为MEMS中新兴的牺牲层材料和绝热层材料。