Based on the nano-imprint lithography (NIL) combining with layered manufacture principle, a novel three-dimensional micro-electronic mechanical system (MEMS) fabrication process is investigated.

• 摘要针对目前微电子机械系统(MEMS)制造中存在的三维加工能力不足的问题，将压印光刻技术和分层制造原理相结合，研究了三维MEMS制造的新工艺。