Automated testing using He-Ne scattering light device was set up. HfO_2/SiO_2 coatings were tested, and compared with plasma spark method and phase contrast microscope method.

• 组建了符合国际规范的He-Ne散射法在线检测损伤系统,对HfO_2/SiO_2高反膜、增透膜进行了阈值检测,并与等离子体闪光法及Nomarski 相衬显微法对损伤的判断做了比较。