Atomic force microscopy (AFM) images show an extremely smooth surface obtained, with a root-mean-square (rms) roughness of about 0.16 nm for a 12 nm thick HfO_2 film.

• 原子力显微镜(AFM)结果表明薄膜表面非常平整；无空洞。 对12nm厚的HfO_2而言；其均方根粗糙度为0.；16nm。