At first of this thesis, the MEMS integrated design platform based on a top-down design and bottom-up verification approach was modeled by UML in the object-oriented method.

• 本文首先以面向对象方法为指导，使用统一建模语言(UML)对基于“top-down”设计和“bottom-up”修正的MEMS集成设计平台进行了建模研究。