Anchor area is a special layer which used at MEMS surface manufacturing process only.The misalignment of this layer affects the performance of MEMS device strongly.

• 与集成电路不同,MEMS器件对薄膜厚度极其敏感,论文随即提出了三种新颖的厚度测试结构和结构模型,分别针对MEMS表面加工工艺中的结构层和牺牲层厚度测量。