An electrostatically actuated in-situ measuring method for average stress gradient and elastic modulus of a MEMS film was proposed based on pull-in voltages of a set of cantilevers.

• 提出了一种利用静电作用下悬臂梁的吸合电压提取MEMS薄膜沿厚度方向的平均应力梯度及弹性模量的方法,该方法的关键在于实现悬臂梁吸合电压的快速、精确计算。