Abstract: The process defect,minor defect and key precess,their impact on quality and reliability,and the control method are introduced.

 
  • 摘要:重点介绍了国内外半导体器件制造工艺与器件可靠性的相关性报道:缺陷、微缺陷、关键工艺对器件质量和可靠性的影响及其控制方法;
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