Abstract This article describes three patent samples which represent the state of the art of cathodic arc plasma depisition in recent years, and gives some summaries.

 
  • 本文介绍了三件阴极电弧沉积的专利。这些专利代表了近年来阴极电弧沉积技术的发展状况,并给予简要的一些评论。
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