A novel Si/Ti/Au/Au/Ti/Si bonding method based on Au/ Si eutectic bonding was presented for forming a gas chamber. The detector was fabricated and responded basically using this bonding method.

• 运用Si/Ti/Au/Au/Ti/Si实现对探测器的金/硅共晶键合封装,形成气室,制备出探测器样品并初步得到响应。