A new ultra-precision synergistic process integrated electrolytic in-process dressing(ELID) grinding and magnetorheological finishing(MRF) was applied to nano-precision finishing for CVD-SiC.

• 利用在线电解修整镜面磨削和磁流变光整加工技术对化学气相沉积碳化硅反射镜进行纳米级精度的加工。