A new method, called SILAR, for preparation of inorganic compound thin films is introduced.The process is inexpensive and easy to control, and produces films of good quality.

 
  • 摘要介绍了一种新的液相法薄膜制备工艺-SILAR法(连续离子层吸附反应法),该方法设备简单,成本低廉,成膜质量好。
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