A new method is put forward to get movement displacement directly when standard reticle of grating is applied to driven worktable whose object is very small for high precise orientation.

 
  • 摘要将计量光栅作为标准刻线,应用到对微细物体高精度定位的工作台上,并提出了一种新的直接获取运动位移的方法。
今日热词
目录 附录 查词历史