A large phase-shifting Fizeau interferometer is used for the measurement.The phase wavefront detected by the interferometer is digitally processed to create one dimension wavefront PSD.

• 探讨了大口径光学元件波前的高空间分辨率检测技术,采用大口径相移干涉仪作为波前检测仪器,通过傅里叶变换获得波前一维功率谱密度分布。