A kind of piezoelectric membrane micropump with novel construction,simple fabrication process,low cost and high performance used for the drastic drug delivery was designed and fabricated.

• 设计开发了一种结构新颖,制作工艺简单,成本低,综合性能高的烈性药物输注用压电薄膜微型泵,介绍了微泵的结构设计、工作原理和性能测试。