7.This paper introduces a method of deep etching of PYREX 7740 glass by one-time lithographing,multiple hardening and etching with Cr and BP-212 photoresist as etching mask.

• 本文对PYREX 7740玻璃湿法刻蚀进行研究,提出了利用铬膜和光刻胶作为掩膜,进行一次光刻、多次坚膜、多次腐蚀的工艺方法。