2 large rectangular gas ion sources (no grid no filament) near the front door for maintenance convenience to provide ionized gasses for better chemical reactive deposition with 4 MS sources (MS1-4).

• 2个全长的（无栅无灯丝）长方形气体离子源安装在前门两边（便于日常维护），为4个磁控靶(MS1-4)更好地进行化学反应沉积提供离化的反应气体。