表征超大规模集成电路互连纳米薄膜硬度特性的声表面波的频散特性

表征超大规模集成电路互连纳米薄膜硬度特性的声表面波的频散特性的英文翻译

基本释义

• Dispersion feature in arbitrary direction of surface acoustic wave applied to property characterization of ultra-large-scale integrated circuit interconnect films