摘要用真空蒸发技术和自然氧化法在玻璃衬底上制备纳米级的硅/氧化硅薄膜和多层膜。

摘要用真空蒸发技术和自然氧化法在玻璃衬底上制备纳米级的硅/氧化硅薄膜和多层膜。的英文翻译

基本释义

• Silicon/Silicon oxide nanofilms and multilayer films were prepared by vacuum evaporation process followed by natural oxidation.