将已经形成在基板上的pattern作成光罩,由基板背面露光之方法。

将已经形成在基板上的pattern作成光罩,由基板背面露光之方法。的英文翻译

基本释义

• It is a method of making the semiconductor mast from well formed pattern on the substrate, and exposes the back of the substrate to light.